CUED Publications database

MEMS based digital variable capacitors with a high-k dielectric insulator

Luo, JK and Lin, M and Fu, YQ and Wang, L and Flewitt, AJ and Spearing, SM and Fleck, NA and Milne, WI (2006) MEMS based digital variable capacitors with a high-k dielectric insulator. Sensors and Actuators A: Physical, 132. pp. 139-146.

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Div C > Materials Engineering
Depositing User: Unnamed user with email sms67@cam.ac.uk
Date Deposited: 18 May 2016 19:13
Last Modified: 24 Jul 2016 22:21
DOI: 10.1016/j.sna.2006.04.025