CUED Publications database

MEMS based digital variable capacitors with a high-k dielectric insulator

Luo, JK and Lin, M and Fu, YQ and Wang, L and Flewitt, AJ and Spearing, SM and Fleck, NA and Milne, WI (2006) MEMS based digital variable capacitors with a high-k dielectric insulator. Sensors and Actuators A: Physical, 132. pp. 139-146.

Full text not available from this repository.
Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div C > Materials Engineering
Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 12:43
Last Modified: 06 Oct 2014 01:23
DOI: 10.1016/j.sna.2006.04.025

Actions (login required)

View Item