CUED Publications database

A systematic approach to process selection in MEMS

Quinn, DJ and Spearing, SM and Ashby, MF and Fleck, NA (2006) A systematic approach to process selection in MEMS. Journal of Microelectromechanical Systems, 15. pp. 1039-1050. ISSN 1057-7157

Full text not available from this repository.
Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div C > Engineering Design
Div C > Materials Engineering
Depositing User: Cron Job
Date Deposited: 17 Jul 2017 19:31
Last Modified: 23 Nov 2017 03:55
DOI: