CUED Publications database

A systematic approach to process selection in MEMS

Quinn, DJ and Spearing, SM and Ashby, MF and Fleck, NA (2006) A systematic approach to process selection in MEMS. Journal of Microelectromechanical Systems, 15. pp. 1039-1050. ISSN 1057-7157

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div C > Materials Engineering
Depositing User: Cron Job
Date Deposited: 28 Oct 2011 16:47
Last Modified: 11 Mar 2013 01:49
DOI: 10.1109/JMEMS.2006.880292

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