CUED Publications database

A systematic approach to process selection in MEMS

Quinn, DJ and Spearing, SM and Ashby, MF and Fleck, NA (2006) A systematic approach to process selection in MEMS. Journal of Microelectromechanical Systems, 15. pp. 1039-1050. ISSN 1057-7157

Full text not available from this repository.
Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div C > Materials Engineering
Div C > Engineering Design
Depositing User: Cron Job
Date Deposited: 18 May 2016 19:01
Last Modified: 25 Aug 2016 10:32
DOI: