CUED Publications database

A systematic approach to process selection in MEMS

Quinn, DJ and Spearing, SM and Ashby, MF and Fleck, NA (2006) A systematic approach to process selection in MEMS. Journal of Microelectromechanical Systems, 15. pp. 1039-1050. ISSN 1057-7157

Full text not available from this repository.
Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div C > Materials Engineering
Div C > Engineering Design
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 11:38
Last Modified: 08 Dec 2014 02:34
DOI: 10.1109/JMEMS.2006.880292