Fu, YQ and Milne, SB and Luo, JK and Flewitt, AJ and Wang, L and Miao, JM and Milne, WI (2006) Variable RF capacitor based on a-Si:H (P-doped) multi-length cantilevers. Journal of Physics: Conference Series, 34. pp. 788-793. ISSN 1742-6588
Full text not available from this repository.
| Item Type: | Article |
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| Additional Information: | This journal contains the proceedings of the International MEMS (Micro Electro Mechanical Systems) Conference 2006, 9–12 May 2006, Singapore. Edited by Francis E H Tay, Miao Jianmin, John Bergstrom and Ciprian Iliescu. |
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| Subjects: | UNSPECIFIED |
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| Divisions: | UNSPECIFIED |
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| Depositing User: | Cron Job |
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| Date Deposited: | 28 Oct 2011 16:46 |
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| Last Modified: | 20 May 2013 01:40 |
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| DOI: | 10.1088/1742-6596/34/1/130 |
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