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Three types of planar structure microspring electro-thermal actuators with insulating beam constraints

Luo, JK and Flewitt, AJ and Spearing, SM and Fleck, NA and Milne, WI (2005) Three types of planar structure microspring electro-thermal actuators with insulating beam constraints. Journal of Micromechanics and Microengineering, 15. pp. 1527-1535. ISSN 0960-1317

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div C > Materials Engineering
Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 11:27
Last Modified: 30 Sep 2014 19:13
DOI: 10.1088/0960-1317/15/8/022

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