CUED Publications database

MEMS actuators and sensors: observations on their performance and selection for purpose

Bell, DJ and Lu, TJ and Fleck, NA and Spearing, SM (2005) MEMS actuators and sensors: observations on their performance and selection for purpose. Jounal of Micromechanics and Microengineering, 15. S153-S164. ISSN 0960-1317

Full text not available from this repository.
Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div C > Materials Engineering
Depositing User: Cron job
Date Deposited: 04 Feb 2015 22:37
Last Modified: 26 Feb 2015 19:02
DOI: 10.1088/0960-1317/15/7/022