CUED Publications database

Development of all metal electro-thermal actuator and its applications

Luo, JK and He, JH and Flewitt, AJ and Moore, D and Spearing, SM and Fleck, NA and Milne, WI (2005) Development of all metal electro-thermal actuator and its applications. Journal of Microlithography, Microfabrication, and Microsystems (JM3), 04. 023012-. ISSN 1537-1646

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Div C > Materials Engineering
Depositing User: Unnamed user with email sms67@cam.ac.uk
Date Deposited: 09 Dec 2016 18:29
Last Modified: 21 Jan 2017 22:46
DOI: