Luo, JK and He, JH and Flewitt, AJ and Moore, D and Spearing, SM and Fleck, NA and Milne, WI (2005) Development of all metal electro-thermal actuator and its applications. Journal of Microlithography, Microfabrication, and Microsystems (JM3), 04. 023012-. ISSN 1537-1646
Full text not available from this repository.| Item Type: | Article |
|---|---|
| Subjects: | UNSPECIFIED |
| Divisions: | Div C > Materials Engineering |
| Depositing User: | Cron Job |
| Date Deposited: | 28 Oct 2011 16:46 |
| Last Modified: | 13 Feb 2012 01:30 |
| DOI: |
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