CUED Publications database

Point defects in ZrO2 high K gate oxide

Robertson, J and Xiong, K and Falabretti, B (2005) Point defects in ZrO2 high K gate oxide. IEEE Transactions on Device and Materials Reliability, 5. pp. 84-89. ISSN 1530-4388

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: UNSPECIFIED
Depositing User: Cron job
Date Deposited: 04 Feb 2015 22:23
Last Modified: 07 May 2015 11:09
DOI: 10.1109/TDMR.2005.845476