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Point defects in ZrO2 high K gate oxide

Robertson, J and Xiong, K and Falabretti, B (2005) Point defects in ZrO2 high K gate oxide. IEEE Transactions on Device and Materials Reliability, 5. pp. 84-89. ISSN 1530-4388

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Electronics, Power & Energy Conversion
Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 11:47
Last Modified: 24 Mar 2014 01:15
DOI: 10.1109/TDMR.2005.845476

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