CUED Publications database

Fabrication of diamond-like amorphous carbon cantilever resonators

Chua, DHC and Milne, WI (2004) Fabrication of diamond-like amorphous carbon cantilever resonators. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 22. pp. 2680-2684. ISSN 1071-1023

Full text not available from this repository.
Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Unnamed user with email sms67@cam.ac.uk
Date Deposited: 15 Dec 2015 12:45
Last Modified: 29 Apr 2016 00:07
DOI: 10.1116/1.1824042