CUED Publications database

Fabrication of diamond-like amorphous carbon cantilever resonators

Chua, DHC and Milne, WI (2004) Fabrication of diamond-like amorphous carbon cantilever resonators. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 22. pp. 2680-2684. ISSN 1071-1023

Full text not available from this repository.
Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 18 May 2016 19:08
Last Modified: 25 Jul 2016 08:02
DOI: 10.1116/1.1824042