CUED Publications database

Fabrication of diamond-like amorphous carbon cantilever resonators

Chua, DHC and Milne, WI (2004) Fabrication of diamond-like amorphous carbon cantilever resonators. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 22. pp. 2680-2684. ISSN 1071-1023

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: UNSPECIFIED
Depositing User: Cron job
Date Deposited: 04 Feb 2015 22:23
Last Modified: 26 Mar 2015 01:43
DOI: 10.1116/1.1824042