CUED Publications database

Fabrication of smooth amorphous carbon micro-cantilevers by lift-off

Sheeja, D and Tay, BK and Lau, SP and Yu, LJ and Miao, JM and Chua, HC and Milne, WI (2004) Fabrication of smooth amorphous carbon micro-cantilevers by lift-off. Sensors and Actuators B: Chemical, 98. pp. 275-281. ISSN 0925-4005

Full text not available from this repository.
Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 11:23
Last Modified: 27 Nov 2014 19:22
DOI: 10.1016/j.snb.2003.10.026