CUED Publications database

Fabrication of smooth amorphous carbon micro-cantilevers by lift-off

Sheeja, D and Tay, BK and Lau, SP and Yu, LJ and Miao, JM and Chua, HC and Milne, WI (2004) Fabrication of smooth amorphous carbon micro-cantilevers by lift-off. Sensors and Actuators B: Chemical, 98. pp. 275-281. ISSN 0925-4005

Full text not available from this repository.
Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 18 May 2016 19:08
Last Modified: 27 Jun 2016 06:42
DOI: 10.1016/j.snb.2003.10.026