CUED Publications database

Fabrication of smooth amorphous carbon micro-cantilevers by lift-off

Sheeja, D and Tay, BK and Lau, SP and Yu, LJ and Miao, JM and Chua, HC and Milne, WI (2004) Fabrication of smooth amorphous carbon micro-cantilevers by lift-off. Sensors and Actuators B: Chemical, 98. pp. 275-281. ISSN 0925-4005

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 02 Sep 2016 17:01
Last Modified: 25 Sep 2016 02:42
DOI: