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Optical and electrical properties of amorphous carbon films deposited using filtered cathodic vacuum arc with pulse biasing

Sze, JY and Tay, BK and Sheeja, D and Lau, SP and Fu, Y-Q and Chua, DHC and Milne, WI (2004) Optical and electrical properties of amorphous carbon films deposited using filtered cathodic vacuum arc with pulse biasing. Thin Solid Films, 447-44. pp. 148-152. ISSN 0040-6090

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Unnamed user with email sms67@cam.ac.uk
Date Deposited: 18 May 2016 19:08
Last Modified: 28 Aug 2016 22:43
DOI: