CUED Publications database

Direct writing of ZrO2 on a sub-10 nm scale using an electron beam

Subramanian, KRV and Saifullah, MSM and Tapley, E and Kang, DJ and Welland, ME and Butler, M (2004) Direct writing of ZrO2 on a sub-10 nm scale using an electron beam. Nanotechnology, 15. pp. 158-162. ISSN 0957-4484

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Unnamed user with email sms67@cam.ac.uk
Date Deposited: 18 May 2016 18:41
Last Modified: 31 May 2016 22:06
DOI: 10.1088/0957-4484/15/1/031