CUED Publications database

Direct writing of ZrO2 on a sub-10 nm scale using an electron beam

Subramanian, KRV and Saifullah, MSM and Tapley, E and Kang, DJ and Welland, ME and Butler, M (2004) Direct writing of ZrO2 on a sub-10 nm scale using an electron beam. Nanotechnology, 15. pp. 158-162. ISSN 0957-4484

Full text not available from this repository.
Item Type: Article
Subjects: UNSPECIFIED
Divisions: UNSPECIFIED
Depositing User: Cron job
Date Deposited: 16 Jul 2015 13:04
Last Modified: 05 Sep 2015 02:03
DOI: 10.1088/0957-4484/15/1/031