CUED Publications database

Direct writing of ZrO2 on a sub-10 nm scale using an electron beam

Subramanian, KRV and Saifullah, MSM and Tapley, E and Kang, DJ and Welland, ME and Butler, M (2004) Direct writing of ZrO2 on a sub-10 nm scale using an electron beam. Nanotechnology, 15. pp. 158-162. ISSN 0957-4484

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: UNSPECIFIED
Depositing User: Cron job
Date Deposited: 04 Feb 2015 22:10
Last Modified: 01 May 2015 19:10
DOI: 10.1088/0957-4484/15/1/031