CUED Publications database

Direct writing of ZrO2 on a sub-10 nm scale using an electron beam

Subramanian, KRV and Saifullah, MSM and Tapley, E and Kang, D-J and Welland, ME and Butler, M (2004) Direct writing of ZrO2 on a sub-10 nm scale using an electron beam. Nanotechnology, 15. pp. 158-162. ISSN 0957-4484

Full text not available from this repository.
Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 09 Dec 2016 17:55
Last Modified: 19 Jan 2017 03:37
DOI: