CUED Publications database

Direct writing of ZrO2 on a sub-10 nm scale using an electron beam

Subramanian, KRV and Saifullah, MSM and Tapley, E and Kang, DJ and Welland, ME and Butler, M (2004) Direct writing of ZrO2 on a sub-10 nm scale using an electron beam. Nanotechnology, 15. pp. 158-162. ISSN 0957-4484

Full text not available from this repository.
Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 11:37
Last Modified: 08 Dec 2014 02:25
DOI: 10.1088/0957-4484/15/1/031