Moore, DF and Williams, JA (2004) Laser prototyping of MEMS structures and SiN cantilvers: experience teaching a practical undergraduate course. IEE Proceedings on Science Measurement and Technology, 151. pp. 54-60. ISSN 1350-2344
Full text not available from this repository.| Item Type: | Article |
|---|---|
| Subjects: | UNSPECIFIED |
| Divisions: | Div C > Materials Engineering |
| Depositing User: | Cron Job |
| Date Deposited: | 07 Mar 2014 11:37 |
| Last Modified: | 10 Mar 2014 17:32 |
| DOI: |
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