CUED Publications database

Laser prototyping of MEMS structures and SiN cantilvers: experience teaching a practical undergraduate course

Moore, DF and Williams, JA (2004) Laser prototyping of MEMS structures and SiN cantilvers: experience teaching a practical undergraduate course. IEE Proceedings on Science Measurement and Technology, 151. pp. 54-60. ISSN 1350-2344

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div C > Materials Engineering
Depositing User: Unnamed user with email sms67@cam.ac.uk
Date Deposited: 15 Dec 2015 12:45
Last Modified: 11 Feb 2016 23:16
DOI: