CUED Publications database

On the optimization of compliant force amplifier mechanisms for surface micromachined resonant accelerometers

Pedersen, CBW and Seshia, AA (2004) On the optimization of compliant force amplifier mechanisms for surface micromachined resonant accelerometers. Journal of Micromechanics and Microengineering, 14. pp. 1281-1293. ISSN 0960-1317

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div C > Applied Mechanics
Depositing User: Cron Job
Date Deposited: 09 Dec 2016 17:33
Last Modified: 22 Jan 2017 04:00
DOI: