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On the optimization of compliant force amplifier mechanisms for surface micromachined resonant accelerometers

Pedersen, CBW and Seshia, AA (2004) On the optimization of compliant force amplifier mechanisms for surface micromachined resonant accelerometers. Journal of Micromechanics and Microengineering, 14. pp. 1281-1293. ISSN 0960-1317

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div C > Applied Mechanics
Depositing User: Cron job
Date Deposited: 16 Jul 2015 13:09
Last Modified: 27 Aug 2015 09:39
DOI: