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Methane chemistry involved in a low-pressure electron cyclotron wave resonant plasma discharge

Morrison, NA and William, C and Milne, WI (2003) Methane chemistry involved in a low-pressure electron cyclotron wave resonant plasma discharge. Journal of Applied Physics, 94. pp. 7031-7043. ISSN 0021-8979

Full text not available from this repository.
Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 12:52
Last Modified: 17 Mar 2014 14:30
DOI: 10.1063/1.1621711

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