CUED Publications database

Influence of inert gases on ionized magnetron plasma deposition of carbon nitride thin films

Kusano, Y and Barber, ZH and Evetts, JE and Hutchings, IM (2003) Influence of inert gases on ionized magnetron plasma deposition of carbon nitride thin films. Surface & Coatings Technology, 174-17. pp. 601-605. ISSN 0257-8972

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div E > Production Processes
Depositing User: Cron Job
Date Deposited: 18 May 2016 18:52
Last Modified: 30 May 2016 07:09
DOI: