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Fabrication of A-C cantilever structures by isotropic and anisotropic wet etching techniques

Sheeja, D and Tay, BK and Yu, LJ and Chua, DHC and Milne, WI and Miao, J and Fu, YQ (2003) Fabrication of A-C cantilever structures by isotropic and anisotropic wet etching techniques. Diamond and Related Materials, 12. pp. 1495-1499. ISSN 0925-9635

Full text not available from this repository.
Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 11:20
Last Modified: 17 Mar 2014 14:30
DOI: 10.1016/S0925-9635(03)00182-1

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