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Fabrication of A-C cantilever structures by isotropic and anisotropic wet etching techniques

Sheeja, D and Tay, BK and Yu, LJ and Chua, DHC and Milne, WI and Miao, J and Fu, YQ (2003) Fabrication of A-C cantilever structures by isotropic and anisotropic wet etching techniques. Diamond and Related Materials, 12. pp. 1495-1499. ISSN 0925-9635

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: UNSPECIFIED
Depositing User: Cron job
Date Deposited: 04 Feb 2015 22:11
Last Modified: 11 May 2015 10:57
DOI: 10.1016/S0925-9635(03)00182-1