Sheeja, D and Tay, BK and Yu, LJ and Chua, DHC and Milne, WI and Miao, J and Fu, YQ (2003) Fabrication of A-C cantilever structures by isotropic and anisotropic wet etching techniques. Diamond and Related Materials, 12. pp. 1495-1499. ISSN 0925-9635Full text not available from this repository.
|Divisions:||Div B > Solid State Electronics and Nanoscale Science|
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|Date Deposited:||09 Dec 2016 17:27|
|Last Modified:||26 Mar 2017 22:31|