Sheeja, D and Tay, BK and Yu, LJ and Chua, DHC and Milne, WI and Miao, J and Fu, YQ (2003) Fabrication of A-C cantilever structures by isotropic and anisotropic wet etching techniques. Diamond and Related Materials, 12. pp. 1495-1499. ISSN 0925-9635
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|Item Type: ||Article|
|Depositing User: ||Cron Job|
|Date Deposited: ||28 Oct 2011 16:45|
|Last Modified: ||20 May 2013 01:34|
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