CUED Publications database

Surface diffusion of SiH3 radicals and growth mechanism of a-Si:H and microcrystalline Si

Dewarrat, R and Robertson, J (2003) Surface diffusion of SiH3 radicals and growth mechanism of a-Si:H and microcrystalline Si. Thin Solid Films, 427. pp. 11-15. ISSN 0040-6090

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 17 Jul 2017 19:56
Last Modified: 05 Oct 2017 02:13
DOI: