CUED Publications database

Surface diffusion of SiH3 radicals and growth mechanism of a-Si:H and microcrystalline Si

Dewarrat, R and Robertson, J (2003) Surface diffusion of SiH3 radicals and growth mechanism of a-Si:H and microcrystalline Si. Thin Solid Films, 427. pp. 11-15. ISSN 0040-6090

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: UNSPECIFIED
Depositing User: Cron job
Date Deposited: 16 Jul 2015 14:02
Last Modified: 26 Jul 2015 03:45
DOI: 10.1016/S0040-6090(02)01173-2