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Binding and surface diffusion of SiH3 radicals and the surface roughness of a-Si:H

Dewarrat, R and Robertson, J (2003) Binding and surface diffusion of SiH3 radicals and the surface roughness of a-Si:H. Applied Physics Letters, 92. pp. 883-885. ISSN 0003-6951

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Unnamed user with email sms67@cam.ac.uk
Date Deposited: 18 May 2016 18:25
Last Modified: 31 May 2016 22:08
DOI: 10.1063/1.1544439