CUED Publications database

Properties of amorphous ZrOx thin films deposited by filtered cathodic vacuum arc

Chua, DHC and Milne, WI and Zhao, ZW and Tay, BK and Lau, SP and Carney, T and White, RG (2002) Properties of amorphous ZrOx thin films deposited by filtered cathodic vacuum arc. Journal of Non-Crystalline Solids, 332. pp. 185-189. ISSN 0022-3093

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: UNSPECIFIED
Depositing User: Cron job
Date Deposited: 04 Feb 2015 22:28
Last Modified: 01 May 2015 18:46
DOI: 10.1016/j.jnoncrysol.2003.09.016