Seshia, AA and Palaniapan, M and Roessig, TA and Howe, RT and Gooch, R and Schimert, T and Montague, S (2002) A vacuum packaged surface micromachined resonant accelerometer. Journal of Microelectromechanical Systems, 11. pp. 784-793. ISSN 1057-7157
Full text not available from this repository.
| Item Type: | Article |
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| Additional Information: | ASME: American Society Of Mechanical Engineers. IEEE: Institute of Electrical and Electronics Engineers |
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| Subjects: | UNSPECIFIED |
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| Divisions: | Div C > Materials Engineering |
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| Depositing User: | Cron Job |
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| Date Deposited: | 28 Oct 2011 16:44 |
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| Last Modified: | 17 Jun 2013 01:09 |
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| DOI: | |
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