CUED Publications database

A vacuum packaged surface micromachined resonant accelerometer

Seshia, AA and Palaniapan, M and Roessig, TA and Howe, RT and Gooch, R and Schimert, T and Montague, S (2002) A vacuum packaged surface micromachined resonant accelerometer. Journal of Microelectromechanical Systems, 11. pp. 784-793. ISSN 1057-7157

Full text not available from this repository.
Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div C > Applied Mechanics
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 11:27
Last Modified: 08 Sep 2014 01:08
DOI:

Actions (login required)

View Item