CUED Publications database

A vacuum packaged surface micromachined resonant accelerometer

Seshia, AA and Palaniapan, M and Roessig, TA and Howe, RT and Gooch, R and Schimert, T and Montague, S (2002) A vacuum packaged surface micromachined resonant accelerometer. Journal of Microelectromechanical Systems, 11. pp. 784-793. ISSN 1057-7157

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div C > Applied Mechanics
Depositing User: Unnamed user with email sms67@cam.ac.uk
Date Deposited: 16 Jul 2015 13:04
Last Modified: 02 Sep 2015 00:29
DOI: