CUED Publications database

A vacuum packaged surface micromachined resonant accelerometer

Seshia, AA and Palaniapan, M and Roessig, TA and Howe, RT and Gooch, R and Schimert, T and Montague, S (2002) A vacuum packaged surface micromachined resonant accelerometer. Journal of Microelectromechanical Systems, 11. pp. 784-793. ISSN 1057-7157

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div C > Applied Mechanics
Depositing User: Cron Job
Date Deposited: 18 May 2016 17:49
Last Modified: 25 Aug 2016 09:33
DOI: