CUED Publications database

Etching behaviour of pure and metal containing amorphous carbon films prepared using filtered cathodic vacuum arc technique

Yu, LJ and Sheeja, D and Tay, BK and Chua, DHC and Milne, WI and Miao, J and Fu, YQ (2002) Etching behaviour of pure and metal containing amorphous carbon films prepared using filtered cathodic vacuum arc technique. Applied Surface Science, 195. pp. 107-116. ISSN 0169-4332

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Unnamed user with email sms67@cam.ac.uk
Date Deposited: 18 May 2016 19:08
Last Modified: 01 Jul 2016 21:47
DOI: