CUED Publications database

Etching behaviour of pure and metal containing amorphous carbon films prepared using filtered cathodic vacuum arc technique

Yu, LJ and Sheeja, D and Tay, BK and Chua, DHC and Milne, WI and Miao, J and Fu, YQ (2002) Etching behaviour of pure and metal containing amorphous carbon films prepared using filtered cathodic vacuum arc technique. Applied Surface Science, 195. pp. 107-116. ISSN 0169-4332

Full text not available from this repository.
Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 11:36
Last Modified: 06 Oct 2014 01:23
DOI: