CUED Publications database

Etching behaviour of pure and metal containing amorphous carbon films prepared using filtered cathodic vacuum arc technique

Yu, LJ and Sheeja, D and Tay, BK and Chua, DHC and Milne, WI and Miao, J and Fu, YQ (2002) Etching behaviour of pure and metal containing amorphous carbon films prepared using filtered cathodic vacuum arc technique. Applied Surface Science, 195. pp. 107-116. ISSN 0169-4332

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: UNSPECIFIED
Depositing User: Cron job
Date Deposited: 04 Feb 2015 22:32
Last Modified: 11 May 2015 10:57
DOI: