CUED Publications database

Etching behaviour of pure and metal containing amorphous carbon films prepared using filtered cathodic vacuum arc technique

Yu, LJ and Sheeja, D and Tay, BK and Chua, DHC and Milne, WI and Miao, J and Fu, YQ (2002) Etching behaviour of pure and metal containing amorphous carbon films prepared using filtered cathodic vacuum arc technique. Applied Surface Science, 195. pp. 107-116. ISSN 0169-4332

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Item Type: Article
Subjects: UNSPECIFIED
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Depositing User: Cron job
Date Deposited: 16 Jul 2015 13:15
Last Modified: 03 Aug 2015 07:11
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