CUED Publications database

Etching behaviour of pure and metal containing amorphous carbon films prepared using filtered cathodic vacuum arc technique

Yu, LJ and Sheeja, D and Tay, BK and Chua, DHC and Milne, WI and Miao, J and Fu, YQ (2002) Etching behaviour of pure and metal containing amorphous carbon films prepared using filtered cathodic vacuum arc technique. Applied Surface Science, 195. pp. 107-116. ISSN 0169-4332

Full text not available from this repository.
Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 09 Dec 2016 17:59
Last Modified: 21 Feb 2017 23:43
DOI: