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Properties of amorphous carbon-silicon alloys deposited by a high plasma density source

Racine, B and Ferrari, AC and Morrison, NA and Hutchings, I and Milne, WI and Robertson, J (2001) Properties of amorphous carbon-silicon alloys deposited by a high plasma density source. Journal of Applied Physics, 90. pp. 5002-5012. ISSN 0021-8979

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div E > Production Processes
Depositing User: Cron Job
Date Deposited: 28 Oct 2011 16:33
Last Modified: 09 Jul 2012 01:02
DOI:

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