CUED Publications database

Sharpness search algorithms for automatic focusing in the scanning electron microscope

Batten, CF and Holburn, DM and Breton, BC and Caldwell, NHM (2001) Sharpness search algorithms for automatic focusing in the scanning electron microscope. Scanning, 23. pp. 112-113. ISSN 0161-0457

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div C > Engineering Design
Depositing User: Cron job
Date Deposited: 04 Feb 2015 23:03
Last Modified: 05 Feb 2015 07:48
DOI: 10.1002/sca.4950230201