CUED Publications database

Plasma oxidation of silicon using an electron cyclotron wave resonance (ecwr) plasma source

Lai, DF and Robertson, J and Milne, WI (2001) Plasma oxidation of silicon using an electron cyclotron wave resonance (ecwr) plasma source. Thin Solid Films, 383. pp. 220-223. ISSN 0040-6090

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: UNSPECIFIED
Depositing User: Cron job
Date Deposited: 16 Jul 2015 13:15
Last Modified: 02 Sep 2015 02:14
DOI: 10.1016/S0040-6090(00)01621-7