CUED Publications database

Chemical sputtering of ta-C: Implications for the deposition of carbon nitride

Morrison, NA and Rodil, SE and Robertson, J and Milne, WI (2001) Chemical sputtering of ta-C: Implications for the deposition of carbon nitride. Journal of Applied Physics, 89. pp. 5754-5759. ISSN 0021-8979

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Unnamed user with email sms67@cam.ac.uk
Date Deposited: 15 Dec 2015 13:13
Last Modified: 29 Apr 2016 00:07
DOI: