CUED Publications database

Deposition of carbon nitride films using an electron cyclotron wave resonance plasma source

Rodil, SE and Morrison, NA and Milne, WI and Robertson, J and Stolojan, V and Jayawardane, DN (2000) Deposition of carbon nitride films using an electron cyclotron wave resonance plasma source. Diamond and Related Materials, 9. pp. 524-529. ISSN 0925-9635

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: UNSPECIFIED
Depositing User: Cron job
Date Deposited: 04 Feb 2015 22:12
Last Modified: 05 Feb 2015 00:18
DOI: 10.1016/S0925-9635(99)00345-3