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Deposition of carbon nitride films using an electron cyclotron wave resonance plasma source

Rodil, SE and Morrison, NA and Milne, WI and Robertson, J and Stolojan, V and Jayawardane, DN (2000) Deposition of carbon nitride films using an electron cyclotron wave resonance plasma source. Diamond and Related Materials, 9. pp. 524-529. ISSN 0925-9635

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Item Type: Article
Additional Information: Unmapped Imported Data : Isbn = 1558995293
Subjects: UNSPECIFIED
Divisions: UNSPECIFIED
Depositing User: Cron Job
Date Deposited: 28 Oct 2011 16:43
Last Modified: 20 May 2013 01:34
DOI: 10.1016/S0925-9635(99)00345-3

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