CUED Publications database

Deposition of carbon nitride films using an electron cyclotron wave resonance plasma source

Rodil, SE and Morrison, NA and Milne, WI and Robertson, J and Stolojan, V and Jayawardane, DN (2000) Deposition of carbon nitride films using an electron cyclotron wave resonance plasma source. Diamond and Related Materials, 9. pp. 524-529. ISSN 0925-9635

Full text not available from this repository.
Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 11:44
Last Modified: 06 Oct 2014 01:23
DOI: 10.1016/S0925-9635(99)00345-3