CUED Publications database

Deposition of carbon nitride films by ionised magnetron sputtering

Kusano, Y and Christou, C and Barber, ZH and Evetts, JE and Hutchings, IM (1999) Deposition of carbon nitride films by ionised magnetron sputtering. Thin Solid Films, 355-35. pp. 117-121. ISSN 0040-6090

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div E > Production Processes
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 12:33
Last Modified: 10 Mar 2014 17:38
DOI:

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