CUED Publications database

Deposition of boron carbon nitride films by dual cathode magnetron sputtering

Kusano, Y and Evetts, JE and Hutchings, IM (1999) Deposition of boron carbon nitride films by dual cathode magnetron sputtering. Thin Solid Films, 343-34. pp. 250-253. ISSN 0040-6090

Full text not available from this repository.
Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div E > Production Processes
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 11:42
Last Modified: 11 Aug 2014 01:09
DOI:

Actions (login required)

View Item