CUED Publications database

Deposition of boron carbon nitride films by dual cathode magnetron sputtering

Kusano, Y and Evetts, JE and Hutchings, IM (1999) Deposition of boron carbon nitride films by dual cathode magnetron sputtering. Thin Solid Films, 343-34. pp. 250-253. ISSN 0040-6090

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div E > Production Processes
Depositing User: Cron job
Date Deposited: 16 Jul 2015 13:08
Last Modified: 03 Aug 2015 07:53
DOI: