CUED Publications database

Deposition of boron carbon nitride films by dual cathode magnetron sputtering

Kusano, Y and Evetts, JE and Hutchings, IM (1999) Deposition of boron carbon nitride films by dual cathode magnetron sputtering. Thin Solid Films, 343-34. pp. 250-253. ISSN 0040-6090

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Item Type: Article
Additional Information: Conference held in Birmingham, Great Britain, August 1998. Editors: Petty, M.; Jackman, R. B.
Subjects: UNSPECIFIED
Divisions: Div E > Production Processes
Depositing User: Cron Job
Date Deposited: 28 Oct 2011 16:34
Last Modified: 17 May 2013 19:06
DOI:

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