Kusano, Y and Evetts, JE and Somekh, RE and Hutchings, IM (1998) Properties of carbon nitride films deposited by magnetron sputtering. Thin Solid Films, 332. pp. 56-61. ISSN 0040-6090
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| Item Type: | Article |
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| Additional Information: | Publisher: Elsevier Science. Conference held in San Diego, California, U.S.A., April 1998 |
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| Subjects: | UNSPECIFIED |
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| Divisions: | Div E > Production Processes |
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| Depositing User: | Cron Job |
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| Date Deposited: | 28 Oct 2011 16:34 |
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| Last Modified: | 20 May 2013 01:36 |
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| DOI: | |
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