CUED Publications database

Properties of carbon nitride films deposited by magnetron sputtering

Kusano, Y and Evetts, JE and Somekh, RE and Hutchings, IM (1998) Properties of carbon nitride films deposited by magnetron sputtering. Thin Solid Films, 332. pp. 56-61. ISSN 0040-6090

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div E > Production Processes
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 11:35
Last Modified: 11 Aug 2014 01:10
DOI:

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