CUED Publications database

FIRST A.I.D.: using remote microscopy and artificial intelligence for SEM fault diagnosis

Caldwell, NHM and Breton, BC and Holburn, DM (1997) FIRST A.I.D.: using remote microscopy and artificial intelligence for SEM fault diagnosis. Scanning: The Journal of Scanning Microscopies, 19. 204-204DOI: 10.1002/sca.4950190303. ISSN 0161-0457

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div C > Engineering Design
Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 11:35
Last Modified: 17 Mar 2014 14:59
DOI: 10.1002/sca.4950190303

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