Lou, HQ and Axen, N and Somekh, RE and Hutchings, IM (1997) Effect of deposition conditions on the characteristics of reactively sputtered titanium nitride films. Surface & Coatings Technology, 90. pp. 123-127. ISSN 0257-8972
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| Item Type: | Article |
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| Additional Information: | Publisher: Elsevier Sequoia SA, Switzerland |
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| Subjects: | UNSPECIFIED |
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| Divisions: | Div E > Production Processes |
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| Depositing User: | Cron Job |
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| Date Deposited: | 28 Oct 2011 16:34 |
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| Last Modified: | 16 May 2013 19:16 |
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| DOI: | |
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