CUED Publications database

Effect of deposition conditions on the characteristics of reactively sputtered titanium nitride films

Lou, HQ and Axen, N and Somekh, RE and Hutchings, IM (1997) Effect of deposition conditions on the characteristics of reactively sputtered titanium nitride films. Surface & Coatings Technology, 90. pp. 123-127. ISSN 0257-8972

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div E > Production Processes
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 11:44
Last Modified: 10 Mar 2014 17:39
DOI: