Hoole, ACF and Welland, ME and Broers, AN (1997) Negative PMMA as a high-resolution resist - the limits and possibilities. Semiconductor Science and Technology, 12. pp. 1166-1170. ISSN 0268-1242Full text not available from this repository.
|Depositing User:||Cron job|
|Date Deposited:||16 Jul 2015 13:06|
|Last Modified:||28 Aug 2015 01:51|