Hoole, ACF and Welland, ME and Broers, AN (1997) Negative PMMA as a high-resolution resist - the limits and possibilities. Semiconductor Science and Technology, 12. pp. 1166-1170. ISSN 0268-1242Full text not available from this repository.
|Depositing User:||Cron job|
|Date Deposited:||04 Feb 2015 22:38|
|Last Modified:||22 May 2015 10:58|