Hoole, ACF and Welland, ME and Broers, AN (1997) Negative PMMA as a high-resolution resist - the limits and possibilities. Semiconductor Science and Technology, 12. pp. 1166-1170. ISSN 0268-1242Full text not available from this repository.
|Divisions:||Div B > Solid State Electronics and Nanoscale Science|
|Depositing User:||Cron Job|
|Date Deposited:||18 May 2016 18:15|
|Last Modified:||27 Jun 2016 07:06|