CUED Publications database

Negative PMMA as a high-resolution resist - the limits and possibilities

Hoole, ACF and Welland, ME and Broers, AN (1997) Negative PMMA as a high-resolution resist - the limits and possibilities. Semiconductor Science and Technology, 12. pp. 1166-1170. ISSN 0268-1242

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Item Type: Article
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Depositing User: Cron job
Date Deposited: 16 Jul 2015 13:06
Last Modified: 28 Aug 2015 01:51
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