Hoole, ACF and Welland, ME and Broers, AN (1997) Negative PMMA as a high-resolution resist - the limits and possibilities. Semiconductor Science and Technology, 12. pp. 1166-1170. ISSN 0268-1242Full text not available from this repository.
|Depositing User:||Cron Job|
|Date Deposited:||28 Oct 2011 16:42|
|Last Modified:||27 May 2013 01:20|
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