Hoole, ACF and Welland, ME and Broers, AN (1997) Negative PMMA as a high-resolution resist - the limits and possibilities. Semiconductor Science and Technology, 12. pp. 1166-1170. ISSN 0268-1242Full text not available from this repository.
|Divisions:||Div B > Solid State Electronics and Nanoscale Science|
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|Date Deposited:||18 May 2016 18:15|
|Last Modified:||30 Aug 2016 23:26|