CUED Publications database

Some effects of phosphorus doping in SiC:H films prepared using ECR-CVD

Ji, R and Yoon, SF and Ahn, J and Milne, WI (1997) Some effects of phosphorus doping in SiC:H films prepared using ECR-CVD. Materials Science and Engineering B: Solid State Materials for Advanced Technology, 48. pp. 215-220. ISSN 0921-5107

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Unnamed user with email sms67@cam.ac.uk
Date Deposited: 02 Sep 2016 16:51
Last Modified: 29 Sep 2016 04:50
DOI: