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Some effects of phosphorus doping in SiC:H films prepared using ECR-CVD

Ji, R and Yoon, SF and Ahn, J and Milne, WI (1997) Some effects of phosphorus doping in SiC:H films prepared using ECR-CVD. Materials Science and Engineering B: Solid State Materials for Advanced Technology, 48. pp. 215-220. ISSN 0921-5107

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Item Type: Article
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Depositing User: Cron job
Date Deposited: 16 Jul 2015 13:14
Last Modified: 02 Aug 2015 01:35
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