CUED Publications database

Micromechanical thermal sensors: comparison of experimental results and simulations

Moulin, AM and Stephenson, RJ and Welland, ME (1997) Micromechanical thermal sensors: comparison of experimental results and simulations. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, 15. pp. 590-596. ISSN 1071-1023

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Item Type: Article
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Depositing User: Cron job
Date Deposited: 04 Feb 2015 22:36
Last Modified: 05 Feb 2015 00:49
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