CUED Publications database

Micromechanical thermal sensors: comparison of experimental results and simulations

Moulin, AM and Stephenson, RJ and Welland, ME (1997) Micromechanical thermal sensors: comparison of experimental results and simulations. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, 15. pp. 590-596. ISSN 1071-1023

Full text not available from this repository.
Item Type: Article
Subjects: UNSPECIFIED
Divisions: UNSPECIFIED
Depositing User: Cron job
Date Deposited: 16 Jul 2015 13:58
Last Modified: 29 Jul 2015 01:02
DOI: