CUED Publications database

Micromechanical thermal sensors: comparison of experimental results and simulations

Moulin, AM and Stephenson, RJ and Welland, ME (1997) Micromechanical thermal sensors: comparison of experimental results and simulations. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, 15. pp. 590-596. ISSN 1071-1023

Full text not available from this repository.
Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 02 Sep 2016 17:15
Last Modified: 01 Dec 2016 08:34
DOI: