Yoon, SF and Ji, R and Ahn, J and Milne, WI (1997) Some effects of boron and phosphorus doping on the properties of SiC:H films prepared using electron cyclotron resonance-chemical vapor deposition. Journal of Vacuum Science and Technology A: Vacuums, Surfaces, and Films, 15. pp. 21-28. ISSN 0734-2101
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|Item Type: ||Article|
|Additional Information: ||Unmapped Imported Data : Isbn = 1558994130|
|Depositing User: ||Cron Job|
|Date Deposited: ||28 Oct 2011 16:42|
|Last Modified: ||27 May 2013 01:20|
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