Yoon, SF and Ji, R and Ahn, J and Milne, WI (1997) Some effects of boron and phosphorus doping on the properties of SiC:H films prepared using electron cyclotron resonance-chemical vapor deposition. Journal of Vacuum Science and Technology A: Vacuums, Surfaces, and Films, 15. pp. 21-28. ISSN 0734-2101Full text not available from this repository.
|Depositing User:||Cron job|
|Date Deposited:||04 Feb 2015 22:24|
|Last Modified:||01 May 2015 18:53|