Yoon, SF and Ji, R and Ahn, J and Milne, WI (1997) Some effects of boron and phosphorus doping on the properties of SiC:H films prepared using electron cyclotron resonance-chemical vapor deposition. Journal of Vacuum Science and Technology A: Vacuums, Surfaces, and Films, 15. pp. 21-28. ISSN 0734-2101
Full text not available from this repository.Item Type: | Article |
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Subjects: | UNSPECIFIED |
Divisions: | Div B > Solid State Electronics and Nanoscale Science |
Depositing User: | Cron Job |
Date Deposited: | 17 Jul 2017 19:51 |
Last Modified: | 17 Apr 2018 03:14 |
DOI: |