Yoon, SF and Ji, R and Ahn, J and Milne, WI (1997) Some effects of boron and phosphorus doping on the properties of SiC:H films prepared using electron cyclotron resonance-chemical vapor deposition. Journal of Vacuum Science and Technology A: Vacuums, Surfaces, and Films, 15. pp. 21-28. ISSN 0734-2101Full text not available from this repository.
|Divisions:||Div B > Solid State Electronics and Nanoscale Science|
|Depositing User:||Unnamed user with email firstname.lastname@example.org|
|Date Deposited:||15 Dec 2015 12:46|
|Last Modified:||02 May 2016 00:49|