Yoon, SF and Ji, R and Ahn, J and Milne, WI (1997) Some effects of boron and phosphorus doping on the properties of SiC:H films prepared using electron cyclotron resonance-chemical vapor deposition. Journal of Vacuum Science and Technology A: Vacuums, Surfaces, and Films, 15. pp. 21-28. ISSN 0734-2101
Full text not available from this repository.
| Item Type: | Article |
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| Additional Information: | Unmapped Imported Data : Isbn = 1558994130 |
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| Subjects: | UNSPECIFIED |
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| Divisions: | UNSPECIFIED |
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| Depositing User: | Cron Job |
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| Date Deposited: | 28 Oct 2011 16:42 |
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| Last Modified: | 27 May 2013 01:20 |
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| DOI: | |
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