CUED Publications database

Incorporation of nitrogen in sputtered carbon films

Axen, N and Botton, GA and Lou, HQ and Somekh, RE and Hutchings, IM (1996) Incorporation of nitrogen in sputtered carbon films. Surface & Coatings Technology, 81. pp. 262-268. ISSN 0257-8972

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div E > Production Processes
Depositing User: Cron job
Date Deposited: 16 Jul 2015 13:40
Last Modified: 03 Aug 2015 07:54
DOI: