CUED Publications database

Incorporation of nitrogen in sputtered carbon films

Axen, N and Botton, GA and Lou, HQ and Somekh, RE and Hutchings, IM (1996) Incorporation of nitrogen in sputtered carbon films. Surface & Coatings Technology, 81. pp. 262-268. ISSN 0257-8972

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div E > Production Processes
Depositing User: Unnamed user with email sms67@cam.ac.uk
Date Deposited: 15 Dec 2015 12:47
Last Modified: 06 May 2016 00:42
DOI: