CUED Publications database

Filtered cathodic vacuum arc (FCVA) deposition of thin film silicon

Bilek, MMM and Milne, WI (1996) Filtered cathodic vacuum arc (FCVA) deposition of thin film silicon. Thin Solid Films, 290-29. pp. 299-304. ISSN 0040-6090

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Unnamed user with email sms67@cam.ac.uk
Date Deposited: 18 May 2016 19:09
Last Modified: 27 Aug 2016 22:38
DOI: