CUED Publications database

Filtered cathodic vacuum arc (FCVA) deposition of thin film silicon

Bilek, MMM and Milne, WI (1996) Filtered cathodic vacuum arc (FCVA) deposition of thin film silicon. Thin Solid Films, 290-29. pp. 299-304. ISSN 0040-6090

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: UNSPECIFIED
Depositing User: Cron job
Date Deposited: 04 Feb 2015 22:19
Last Modified: 12 Feb 2015 01:19
DOI: