CUED Publications database

Filtered cathodic vacuum arc (FCVA) deposition of thin film silicon

Bilek, MMM and Milne, WI (1996) Filtered cathodic vacuum arc (FCVA) deposition of thin film silicon. Thin Solid Films, 290-29. pp. 299-304. ISSN 0040-6090

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 15 Dec 2015 12:46
Last Modified: 08 Feb 2016 08:19
DOI: