Bilek, MMM and Milne, WI (1996) Filtered cathodic vacuum arc (FCVA) deposition of thin film silicon. Thin Solid Films, 290-29. pp. 299-304. ISSN 0040-6090
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| Item Type: | Article |
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| Additional Information: | Volume title: Metallurgical Coatings and Thin Films. Edited by Sartwell, B. D.; McGuire, G. E.; Jehn, H. A.; Petrov, I. Unmapped Imported Data : Isbn = 1558993711 |
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| Subjects: | UNSPECIFIED |
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| Divisions: | UNSPECIFIED |
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| Depositing User: | Cron Job |
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| Date Deposited: | 28 Oct 2011 16:42 |
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| Last Modified: | 20 May 2013 01:37 |
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| DOI: | |
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