Liu, YJ and Yoon, SF and Ahn, J and Milne, WI (1996) Effect of hydrogen dilution on the deposition of carbon-rich a-SiC:H films by the electron cyclotron resonance method. Materials Science and Engineering B, 39. pp. 188-194. ISSN 0921-5107
Full text not available from this repository.| Item Type: | Article |
|---|---|
| Subjects: | UNSPECIFIED |
| Divisions: | Div B > Solid State Electronics and Nanoscale Science |
| Depositing User: | Cron Job |
| Date Deposited: | 07 Mar 2014 12:51 |
| Last Modified: | 17 Mar 2014 14:30 |
| DOI: |
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