Effect of hydrogen dilution on the deposition of carbon-rich a-SiC:H films by the electron cyclotron resonance method

Liu, YJ and Yoon, SF and Ahn, J and Milne, WI (1996) Effect of hydrogen dilution on the deposition of carbon-rich a-SiC:H films by the electron cyclotron resonance method. Materials Science and Engineering B, 39. pp. 188-194. ISSN 0921-5107

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Item Type:	Article
Subjects:	UNSPECIFIED
Divisions:	UNSPECIFIED
Depositing User:	Cron job
Date Deposited:	04 Feb 2015 23:15
Last Modified:	05 Feb 2015 01:34
DOI:

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