CUED Publications database

Effect of hydrogen dilution on the deposition of carbon-rich a-SiC:H films by the electron cyclotron resonance method

Liu, YJ and Yoon, SF and Ahn, J and Milne, WI (1996) Effect of hydrogen dilution on the deposition of carbon-rich a-SiC:H films by the electron cyclotron resonance method. Materials Science and Engineering B, 39. pp. 188-194. ISSN 0921-5107

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Item Type: Article
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Depositing User: Cron job
Date Deposited: 16 Jul 2015 13:14
Last Modified: 26 Jul 2015 03:21
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