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Effect of hydrogen dilution on the deposition of carbon-rich a-SiC:H films by the electron cyclotron resonance method

Liu, YJ and Yoon, SF and Ahn, J and Milne, WI (1996) Effect of hydrogen dilution on the deposition of carbon-rich a-SiC:H films by the electron cyclotron resonance method. Materials Science and Engineering B, 39. pp. 188-194. ISSN 0921-5107

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Unnamed user with email sms67@cam.ac.uk
Date Deposited: 15 Dec 2015 13:13
Last Modified: 05 May 2016 23:44
DOI: