Yoon, SF and Ji, R and Ahn, J and Milne, WI (1996) The effect of microwave power on the deposition of boron-doped a-SiC:H films using the electron cyclotron resonance method. Thin Solid Films, 288. pp. 155-159. ISSN 0040-6090Full text not available from this repository.
|Divisions:||Div B > Solid State Electronics and Nanoscale Science|
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|Date Deposited:||15 Dec 2015 13:13|
|Last Modified:||05 May 2016 05:37|