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The effect of microwave power on the deposition of boron-doped a-SiC:H films using the electron cyclotron resonance method

Yoon, SF and Ji, R and Ahn, J and Milne, WI (1996) The effect of microwave power on the deposition of boron-doped a-SiC:H films using the electron cyclotron resonance method. Thin Solid Films, 288. pp. 155-159. ISSN 0040-6090

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Item Type: Article
Subjects: UNSPECIFIED
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Depositing User: Cron job
Date Deposited: 04 Feb 2015 23:15
Last Modified: 05 Feb 2015 01:34
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