Yoon, SF and Ji, R and Ahn, J and Milne, WI (1996) The effect of microwave power on the deposition of boron-doped a-SiC:H films using the electron cyclotron resonance method. Thin Solid Films, 288. pp. 155-159. ISSN 0040-6090
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|Item Type: ||Article|
|Additional Information: ||Unmapped Imported Data : Isbn = 1558993711|
|Depositing User: ||Cron Job|
|Date Deposited: ||28 Oct 2011 16:42|
|Last Modified: ||15 Nov 2011 10:17|
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