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The effect of microwave power on the deposition of boron-doped a-SiC:H films using the electron cyclotron resonance method

Yoon, SF and Ji, R and Ahn, J and Milne, WI (1996) The effect of microwave power on the deposition of boron-doped a-SiC:H films using the electron cyclotron resonance method. Thin Solid Films, 288. pp. 155-159. ISSN 0040-6090

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 15 Dec 2015 13:13
Last Modified: 13 Feb 2016 04:50
DOI: