Yoon, SF and Ji, R and Ahn, J and Milne, WI (1996) The effect of microwave power on the deposition of boron-doped a-SiC:H films using the electron cyclotron resonance method. Thin Solid Films, 288. pp. 155-159. ISSN 0040-6090
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| Item Type: | Article |
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| Additional Information: | Unmapped Imported Data : Isbn = 1558993711 |
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| Subjects: | UNSPECIFIED |
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| Divisions: | UNSPECIFIED |
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| Depositing User: | Cron Job |
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| Date Deposited: | 28 Oct 2011 16:42 |
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| Last Modified: | 15 Nov 2011 10:17 |
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| DOI: | |
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