CUED Publications database

Photo-enhanced chemical vapour deposition of hydrogenated amorphous silicon carbon using an internal discharge lamp

Miyajima, S and Milne, WI and Yoon, SF and Tan, HS (1995) Photo-enhanced chemical vapour deposition of hydrogenated amorphous silicon carbon using an internal discharge lamp. Materials Science and Engineering B: Solid–State Materials for Advanced Technology, 35. pp. 138-144. ISSN 0921-5107

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Item Type: Article
Subjects: UNSPECIFIED
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Depositing User: Cron job
Date Deposited: 04 Feb 2015 22:22
Last Modified: 26 Mar 2015 01:43
DOI: 10.1016/0921-5107(95)01390-3