CUED Publications database

Photo-enhanced chemical vapour deposition of hydrogenated amorphous silicon carbon using an internal discharge lamp

Miyajima, S and Milne, WI and Yoon, SF and Tan, HS (1995) Photo-enhanced chemical vapour deposition of hydrogenated amorphous silicon carbon using an internal discharge lamp. Materials Science and Engineering B: Solid–State Materials for Advanced Technology, 35. pp. 138-144. ISSN 0921-5107

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Unnamed user with email sms67@cam.ac.uk
Date Deposited: 02 Sep 2016 18:22
Last Modified: 08 Dec 2016 06:05
DOI: