Miyajima, S and Milne, WI and Yoon, SF and Tan, HS (1995) Photo-enhanced chemical vapour deposition of hydrogenated amorphous silicon carbon using an internal discharge lamp. Materials Science and Engineering B: Solid–State Materials for Advanced Technology, 35. pp. 138-144. ISSN 0921-5107
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| Item Type: | Article |
| Subjects: | UNSPECIFIED |
| Divisions: | UNSPECIFIED |
| Depositing User: | Cron Job |
| Date Deposited: | 28 Oct 2011 16:42 |
| Last Modified: | 20 May 2013 10:11 |
| DOI: | 10.1016/0921-5107(95)01390-3 |
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