CUED Publications database

Conducting atomic force microscopy study of silicon dioxide breakdown

Atta, RM and O'Shea, SJ and Murrell, MP and Welland, ME (1995) Conducting atomic force microscopy study of silicon dioxide breakdown. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, 13. pp. 1945-1952. ISSN 1071-1023

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: UNSPECIFIED
Depositing User: Cron Job
Date Deposited: 28 Oct 2011 16:42
Last Modified: 20 May 2013 01:32
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