CUED Publications database

Conducting atomic force microscopy study of silicon dioxide breakdown

Atta, RM and O'Shea, SJ and Murrell, MP and Welland, ME (1995) Conducting atomic force microscopy study of silicon dioxide breakdown. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, 13. pp. 1945-1952. ISSN 1071-1023

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Item Type: Article
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Depositing User: Unnamed user with email sms67@cam.ac.uk
Date Deposited: 16 Jul 2015 13:32
Last Modified: 03 Sep 2015 22:01
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