CUED Publications database

Conducting atomic force microscopy study of silicon dioxide breakdown

Atta, RM and O'Shea, SJ and Murrell, MP and Welland, ME (1995) Conducting atomic force microscopy study of silicon dioxide breakdown. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, 13. pp. 1945-1952. ISSN 1071-1023

Full text not available from this repository.
Item Type: Article
Subjects: UNSPECIFIED
Divisions: UNSPECIFIED
Depositing User: Cron job
Date Deposited: 16 Jul 2015 13:32
Last Modified: 05 Aug 2015 02:06
DOI: