CUED Publications database

Conducting atomic force microscopy study of silicon dioxide breakdown

Atta, RM and O'Shea, SJ and Murrell, MP and Welland, ME (1995) Conducting atomic force microscopy study of silicon dioxide breakdown. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, 13. pp. 1945-1952. ISSN 1071-1023

Full text not available from this repository.
Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 11:43
Last Modified: 08 Dec 2014 02:11
DOI: