CUED Publications database

A one-dimensional piezoelectric-driven inertial micropositioner with vertical capabilities

Woodburn, CN and McKinnon, AW and Roberts, DA and Taylor, ME and Welland, ME (1993) A one-dimensional piezoelectric-driven inertial micropositioner with vertical capabilities. Measurement Science and Technology, 4. pp. 535-537. ISSN 0957-0233

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 18 May 2016 18:09
Last Modified: 29 Aug 2016 07:05
DOI: