CUED Publications database

A one-dimensional piezoelectric-driven inertial micropositioner with vertical capabilities

Woodburn, CN and McKinnon, AW and Roberts, DA and Taylor, ME and Welland, ME (1993) A one-dimensional piezoelectric-driven inertial micropositioner with vertical capabilities. Measurement Science and Technology, 4. pp. 535-537. ISSN 0957-0233

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: UNSPECIFIED
Depositing User: Cron job
Date Deposited: 04 Feb 2015 22:10
Last Modified: 01 May 2015 18:57
DOI: 10.1088/0957-0233/4/4/016