Uchida, Y and Milne, WI and Deane, SC (1992) Posthydrogenation of low-pressure chemical-vapor-deposited amorphous silicon using a novel internal lamp system and its application to thin-film transistor fabrication. Journal of Applied Physics, 72. pp. 3150-3154. ISSN 0021-8979
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|Item Type: ||Article|
|Depositing User: ||Cron Job|
|Date Deposited: ||28 Oct 2011 16:41|
|Last Modified: ||11 Mar 2013 01:58|
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