Uchida, Y and Milne, WI and Deane, SC (1992) Posthydrogenation of low-pressure chemical-vapor-deposited amorphous silicon using a novel internal lamp system and its application to thin-film transistor fabrication. Journal of Applied Physics, 72. pp. 3150-3154. ISSN 0021-8979Full text not available from this repository.
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|Date Deposited:||16 Jul 2015 13:14|
|Last Modified:||09 Oct 2015 22:52|