CUED Publications database

Study of reactive ion etched nanometre size trenches using a combined scanning electron microscope and scanning tunnelling microscope

Rosolen, GC and Wong, TKS and Welland, ME (1992) Study of reactive ion etched nanometre size trenches using a combined scanning electron microscope and scanning tunnelling microscope. Nanotechnology, 3. pp. 49-53. ISSN 0957-4484

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 18 May 2016 18:42
Last Modified: 24 Aug 2016 04:12
DOI: