CUED Publications database

Study of reactive ion etched nanometre size trenches using a combined scanning electron microscope and scanning tunnelling microscope

Rosolen, GC and Wong, TKS and Welland, ME (1992) Study of reactive ion etched nanometre size trenches using a combined scanning electron microscope and scanning tunnelling microscope. Nanotechnology, 3. pp. 49-53. ISSN 0957-4484

Full text not available from this repository.
Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 11:34
Last Modified: 08 Dec 2014 02:33
DOI: 10.1088/0957-4484/3/2/001