CUED Publications database

The direct photochemical vapour deposition of SiO2 from Si2H6 and N2O3 mixtures

Bhatnagar, YK and Milne, WI (1989) The direct photochemical vapour deposition of SiO2 from Si2H6 and N2O3 mixtures. Thin Solid Films, 168. pp. 345-352. ISSN 0040-6090

Full text not available from this repository.
Item Type: Article
Subjects: UNSPECIFIED
Divisions: UNSPECIFIED
Depositing User: Cron job
Date Deposited: 16 Jul 2015 13:07
Last Modified: 31 Aug 2015 07:56
DOI: 10.1016/0040-6090(89)90018-7