CUED Publications database

The direct photochemical vapour deposition of SiO2 from Si2H6 and N2O3 mixtures

Bhatnagar, YK and Milne, WI (1989) The direct photochemical vapour deposition of SiO2 from Si2H6 and N2O3 mixtures. Thin Solid Films, 168. pp. 345-352. ISSN 0040-6090

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: UNSPECIFIED
Depositing User: Cron job
Date Deposited: 04 Feb 2015 22:26
Last Modified: 03 Jul 2015 10:58
DOI: 10.1016/0040-6090(89)90018-7