CUED Publications database

The direct photochemical vapour deposition of SiO2 from Si2H6 and N2O3 mixtures

Bhatnagar, YK and Milne, WI (1989) The direct photochemical vapour deposition of SiO2 from Si2H6 and N2O3 mixtures. Thin Solid Films, 168. pp. 345-352. ISSN 0040-6090

Full text not available from this repository.
Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 11:34
Last Modified: 08 Dec 2014 02:28
DOI: 10.1016/0040-6090(89)90018-7