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Direct UV photoenhanced chemical vapour deposition of a-Si:H from disilane using a deuterium lamp

Bhatnagar, YK and Milne, WI (1988) Direct UV photoenhanced chemical vapour deposition of a-Si:H from disilane using a deuterium lamp. Thin Solid Films, 163. pp. 237-240. ISSN 0040-6090

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Unnamed user with email sms67@cam.ac.uk
Date Deposited: 15 Dec 2015 12:47
Last Modified: 05 May 2016 05:36
DOI: 10.1016/0040-6090(88)90429-4