CUED Publications database

Photoenhanced deposition of silicon oxide thin films using a novel windowless internal nitrogen discharge lamp

Baker, SD and Milne, WI (1988) Photoenhanced deposition of silicon oxide thin films using a novel windowless internal nitrogen discharge lamp. Applied Physics A: Materials Science and Processing, 46. pp. 243-248. ISSN 0947-8396

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Div B > Photonics
Depositing User: Unnamed user with email sms67@cam.ac.uk
Date Deposited: 09 Dec 2016 17:51
Last Modified: 01 May 2017 03:57
DOI: