CUED Publications database

Photoenhanced deposition of silicon oxide thin films using a novel windowless internal nitrogen discharge lamp

Baker, SD and Milne, WI (1988) Photoenhanced deposition of silicon oxide thin films using a novel windowless internal nitrogen discharge lamp. Applied Physics A: Materials Science and Processing, 46. pp. 243-248. ISSN 0947-8396

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Photonics
Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 11:54
Last Modified: 06 Oct 2014 01:24
DOI: 10.1007/BF01141589

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