CUED Publications database

Low-temperature annealing of deposited silicon oxide films

Eagle, DJ and Milne, WI (1987) Low-temperature annealing of deposited silicon oxide films. Semiconductor Science and Technology, 2. pp. 56-59. ISSN 0268-1242

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: UNSPECIFIED
Depositing User: Cron job
Date Deposited: 04 Feb 2015 22:38
Last Modified: 01 May 2015 18:53
DOI: 10.1088/0268-1242/2/1/008