CUED Publications database

Low-temperature annealing of deposited silicon oxide films

Eagle, DJ and Milne, WI (1987) Low-temperature annealing of deposited silicon oxide films. Semiconductor Science and Technology, 2. pp. 56-59. ISSN 0268-1242

Full text not available from this repository.
Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 02 Sep 2016 17:09
Last Modified: 26 Sep 2016 03:49
DOI: