CUED Publications database

Low-temperature annealing of deposited silicon oxide films

Eagle, DJ and Milne, WI (1987) Low-temperature annealing of deposited silicon oxide films. Semiconductor Science and Technology, 2. pp. 56-59. ISSN 0268-1242

Full text not available from this repository.
Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Unnamed user with email sms67@cam.ac.uk
Date Deposited: 15 Dec 2015 12:47
Last Modified: 08 Feb 2016 03:53
DOI: 10.1088/0268-1242/2/1/008