CUED Publications database

Low-temperature annealing of deposited silicon oxide films

Eagle, DJ and Milne, WI (1987) Low-temperature annealing of deposited silicon oxide films. Semiconductor Science and Technology, 2. pp. 56-59. ISSN 0268-1242

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 18 May 2016 19:03
Last Modified: 27 Aug 2016 04:31
DOI: