CUED Publications database

Production of silicon oxides from glow discharge decomposition of silane and nitric oxide

Eagle, DJ and Milne, WI (1986) Production of silicon oxides from glow discharge decomposition of silane and nitric oxide. Electronics Letters, 22. pp. 1243-1244. ISSN 0013-5194

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: UNSPECIFIED
Depositing User: Cron Job
Date Deposited: 28 Oct 2011 16:40
Last Modified: 11 Mar 2013 02:01
DOI: 10.1049/el:19860852

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