CUED Publications database

Production of silicon oxides from glow discharge decomposition of silane and nitric oxide

Eagle, DJ and Milne, WI (1986) Production of silicon oxides from glow discharge decomposition of silane and nitric oxide. Electronics Letters, 22. pp. 1243-1244. ISSN 0013-5194

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 02 Sep 2016 16:45
Last Modified: 25 Sep 2016 02:41
DOI: