CUED Publications database

Production of silicon oxides from glow discharge decomposition of silane and nitric oxide

Eagle, DJ and Milne, WI (1986) Production of silicon oxides from glow discharge decomposition of silane and nitric oxide. Electronics Letters, 22. pp. 1243-1244. ISSN 0013-5194

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: UNSPECIFIED
Depositing User: Unnamed user with email sms67@cam.ac.uk
Date Deposited: 16 Jul 2015 13:14
Last Modified: 03 Sep 2015 22:36
DOI: 10.1049/el:19860852