CUED Publications database

Production of silicon oxides from glow discharge decomposition of silane and nitric oxide

Eagle, DJ and Milne, WI (1986) Production of silicon oxides from glow discharge decomposition of silane and nitric oxide. Electronics Letters, 22. pp. 1243-1244. ISSN 0013-5194

Full text not available from this repository.
Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 11:34
Last Modified: 06 Oct 2014 01:24
DOI: 10.1049/el:19860852