CUED Publications database

Compositional profiling of thin film semiconductors and insulators using LIMA

Eagle, DJ and Milne, WI and Smith, GJ (1985) Compositional profiling of thin film semiconductors and insulators using LIMA. Applications of Surface Science, 22-23. pp. 930-936. ISSN 0169-4332

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Unnamed user with email sms67@cam.ac.uk
Date Deposited: 15 Dec 2015 13:13
Last Modified: 11 Feb 2016 03:13
DOI: 10.1016/0378-5963(85)90226-0